The ASU team set out to develop the first compact X-ray free electron laser, or CXFEL. A dramatically smaller and less ...

The Lawrence Livermore National Laboratory is working on a petawatt-class thulium laser that is said to be 10 times more efficient than the CO2 lasers used in EUV tools and could replace CO2 ...

For more than 30 years, laser frequency conversion ... of the drive laser field, the electron's kinetic energy is released in the form of an energetic EUV photon. High-harmonic generation was ...

However, the move from 193 nm excimer laser technology to 13.5 nm EUV technology has been far from straightforward, for a number of reasons. First, because EUV light is absorbed by air (in ...