Planar System consists of moving element called the forcer which glides on the frictionless air bearings over special "waffle-like "surface called platen. Planar forcer contains two or four linear ...
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Ultra-Low Profile XY-Theta Nanopositioning Stage Uses Air BearingsAuburn, MA – PI, a global leader in precision motion control and nanopositioning products releases a unique planar XY-Theta-Z nanopositioning stage based on air bearings and direct drive motors.
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